Advancement in Fast Thermal Processing Systems

12

FEB
2025

Global TechSolutions Advances in Fast Thermal Processing Systems for Semiconductor Manufacturing

Global TechSolutions is proud to showcase our growth in semiconductor solutions services: Our advanced capability in Fast Thermal Processing Systems (FTPS) heaters. These heaters are key enablers of fast-ramp batch furnace processing used in efficient front-end semiconductor nano-manufacturing.

In semiconductor fabrication, controlled thermal processing is crucial. Furnaces are used to process semiconductor wafers by carefully controlling the heat for deposition and growth of films, induction of chemical reactions, controlling stress and topography, and annealing defects introduced by energetic processes.

FTPS heaters can ramp as quickly as 100°C per minute and cool down at a rate of up to 60°C per minute, giving better control over surface reactions; it allows multiple thermal steps to be executed sequentially in the same furnace. This rapid thermal response reduces cycle times, boosts throughput, and delivers improved wafer uniformity and electrical performance – all while offering a cost-effective, high-performance solution for advanced semiconductors.

We are qualified in most major fabs and we welcome your enquiries on our solution.

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