We provide refurbishment, repair, and measurement services for advanced metrology systems used in semiconductor process control. These tools perform high-precision thickness measurement, film uniformity mapping, and topography analysis using patented non-contact technology in both air and water environments. Designed for minimal operator handling and high-throughput performance, they support a wide range of applications across 200mm and 300mm production lines.

At GTS, we have the equipment in-house to perform both system repairs and metrology services directly.

• GTS focuses on parts repair soutions and quality control.
• Repair Report for all repair / overhaul items.
• Strongly preferred to have a customer-qualified wafer for post-acceptance