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CMP Consumable Parts

CMP Consumable Parts

We supply CMP consumable parts to ensure consistent performance and high yield in wafer planarization

Membrane

Model: AMAT Reflexion / LK, Ebara 300S/300S2, Ebara 300X

Membrane

Model: AMAT Reflexion / Reflexion LK, Ebara FREX300s, Ebara FREX300s2.

Membrane
Chuck Rollers

Chuck Roller

Model: Ebara 300S2

CMP Pad

Model: AMAT Reflexion / Reflexion LK, Ebara FREX300s, Ebara FREX300s2.

CMP Pad

Model: AMAT Reflexion / Reflexion LK, Ebara FREX300s, Ebara FREX300s2.

CMP Pad
Idler Roller

Idler Roller

Model: AMAT Reflexion / Reflexion LK, Ebara FREX300s, Ebara FREX300s2.

Gasket

Model: LAM, Ebara & TEL

Gasket

Model: LAM, Ebara & TEL

Gasket

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