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Semiconductor Repair & Refurbishment Services

Semiconductor Repair & Refurbishment Services

Global TechSolutions provides repair and refurbishment support for semiconductor equipment, components and subsystems used in front-end manufacturing equipment.

Extend the service life of semiconductor equipment and critical components through targeted repair and refurbishment. By repairing component-level parts and replacing worn or serviceable items where required, GTS helps reduce unnecessary replacement CAPEX and support continued equipment operation.

Looking for complete semiconductor equipment refurbishment?

For complete 200 mm and 300 mm process tools, view our dedicated semiconductor equipment refurbishment capabilities.

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Semiconductor Components & Assemblies We Support

GTS supports repair and refurbishment across mechanical, thermal, robotic and electronic assemblies used in semiconductor manufacturing equipment.

01
Wafer Handling Robotics

Repair, refurbishment, testing, teaching and installation support for wafer-handling robots.

02
Diffusion Furnace Heaters

Inspection, repair and refurbishment of vertical furnace heater assemblies.

03
Pressure Control Valves

Repair and refurbishment of semiconductor pressure-control valve assemblies.

04
Controllers, PCBs & Power Supplies

Evaluation and repair of electronic control assemblies used in semiconductor equipment.

05
Chucks & Pump Assemblies

Repair and service support for semiconductor chuck and pump assemblies.

06
Semiconductor In-line Metrology Components

Repair coverage for metrology measurement units, control units, handlers, light source and beam alignment assemblies, controllers and power supply modules.

Repair & Refurbishment Scope

Support can range from individual semiconductor equipment components to larger assemblies and complete equipment, depending on the platform and service requirement.

01

Technical Evaluation

Review the equipment or component condition, reported fault and available service information before defining the repair or refurbishment scope.

02

Repair & Refurbishment

Carry out the agreed repair, refurbishment or overhaul work on supported equipment, components or assemblies.

03

Parts Replacement

Replace serviceable parts or consumable items where required as part of the agreed repair or refurbishment work.

04

Testing & Verification

Perform applicable functional checks, testing or verification activities according to the item and agreed service scope.

05

Installation & Technical Support

Provide on-site installation or technical support where required after repair or refurbishment work.

Interested to find out more?

Contact us today for expert guidance