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AMAT

AMAT

VHP Robot

Vacuum Robot | Transfer Chamber Robot

Model: Endura, Centura, Producer

Process: PVD, CVD, Etch, Diffusion

Wafer Size: 200mm, 300mm

Vacuum Robot | Transfer Chamber Robot

Model: Endura, Centura, Producer

Process: PVD, CVD, Etch, Diffusion

Wafer Size: 200mm, 300mm

VHP
AMAT VXP

XP Robot

Wafer Transfer Robot

Model: Endura / Producer / Centura

Process: CVD, PVD

Wafer Size: 200mm, 300mm

VXP Robot

Wafer Transfer Robot

Model:  Producer / Centura

Process: CVD

Wafer Size: 200mm, 300mm

Wafer Transfer Robot

Model:  Producer / Centura

Process: CVD

Wafer Size: 200mm, 300mm

VXP

 

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