Vacuum Robot | Transfer Chamber Robot
Model: Endura, Centura, Producer
Process: PVD, CVD, Etch, Diffusion
Wafer Size: 200mm, 300mm
Vacuum Robot | Transfer Chamber Robot
Model: Endura, Centura, Producer
Process: PVD, CVD, Etch, Diffusion
Wafer Size: 200mm, 300mm
Wafer Transfer Robot
Model: Endura / Producer / Centura
Process: CVD, PVD
Wafer Size: 200mm, 300mm
Wafer Transfer Robot
Model: Producer / Centura
Process: CVD
Wafer Size: 200mm, 300mm
Wafer Transfer Robot
Model: Producer / Centura
Process: CVD
Wafer Size: 200mm, 300mm