Equipment
AMAT / Varian
Yaskawa Wafer Handling Robot Repair & Overhaul
Global TechSolutions provides repair, overhaul and engineering support for Yaskawa wafer handling robots used across front-end semiconductor equipment.
Our current Yaskawa robotics coverage includes XU-RC and XU-RCM robot assemblies used on equipment from AMAT, Varian, Rudolph, Axcelis and KLA, together with supported Yaskawa aligners and controllers.
XU-RC350D
XU-RC400M
XU-RCM6841 / 6802
XU-RCM9206
XU-RCM7410
Yaskawa Controller
Yaskawa Robot Coverage
Equipment
Rudolph
Equipment
AMAT Centura / Endura
Equipment
AMAT Vantage
Equipment
Axcelis
Equipment
KLA
Aligner & Controller Coverage
Yaskawa Aligner
Supported wafer alignment hardware.
- XU-ACP330
Yaskawa Controllers & Drivers
Controller and driver assemblies for compatible Yaskawa robotics systems.
- ERCR-NS01-B003
- ERCR-NS01-B004
- XU-BCD2010C
- XU-BCD2011C
- XU-BCD2081D
- XU-CN1170A
- XU-BCD3111
Robotics Support Scope
Support is focused on restoring robot condition, movement and repeatability across supported Yaskawa assemblies and related control hardware.
01
Evaluation
Inspection and condition assessment of supported robot, aligner and controller assemblies.
02
Repair & Overhaul
Mechanical and electrical repair, refurbishment and component-level overhaul according to condition.
03
Calibration & Testing
Alignment, calibration and functional verification of serviced robotics assemblies.
04
Installation Support
Installation and engineering support for compatible Yaskawa robotics and equipment configurations.
Interested to find out more?
Contact us today for expert guidance