系統平台

• 300mm

  AMAT Centura (Enabler E2, E5)

  AMAT Producer (STD, Georgia, Georgia CIP)

  AMAT Centura / Sym3

  LAM Exelan (Flex 45, DX)

  LAM Versys Kiyo 45, CX, EX

• 200mm

  LAM Exelan Flex CX

  LAM DFM 9400

  Novellus Speed ESC