At GTS, we provide expert refurbishment, repair, and maintenance services for advanced metrology systems used in semiconductor process control, including deposition, etch, CMP, and thin-film measurement applications. Our in-house capabilities enable system repairs, parts replacement, and comprehensive quality verification, ensuring your equipment operates at peak performance and reliability. Every service is accompanied by a detailed repair report, and we strongly recommend using a customer-qualified wafer for post-acceptance verification. By maintaining your metrology tools in optimal condition, we help semiconductor manufacturers achieve consistent and accurate measurements across 200mm and 300mm production lines.