KLA SP1/2 300mm
KLA SP1/2 300mm
We offer refurbishment and support for the KLA SP1/SP2, industry-standard tools for optical surface inspection in semiconductor manufacturing.
These systems provide high-sensitivity particle and defect detection across 300mm wafers, using advanced darkfield and brightfield imaging techniques. Ideal for front-end process monitoring, the SP1/SP2 helps identify yield-limiting defects early in the production flow.
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