KLA Surfscan SP1 / SP2
KLA Surfscan SP1 / SP2
The KLA Surfscan SP1 and SP2 are unpatterned wafer inspection systems used for semiconductor surface inspection and defect detection. Global TechSolutions supports Surfscan SP1/SP2 equipment through refurbishment, installation, preventive maintenance, troubleshooting and laser-system support.
KLA Surfscan SP1 / SP2 Overview
KLA Surfscan SP1 and SP2 systems are used for optical inspection of unpatterned semiconductor wafers. The systems scan wafer surfaces to identify particles, defects and other surface conditions that can affect semiconductor manufacturing.
The Surfscan SP1 uses visible-light laser inspection technology, while the later SP2 platform introduced ultraviolet laser technology for higher-sensitivity unpatterned wafer inspection.
Global TechSolutions supports KLA Surfscan SP1 and SP2 equipment with refurbishment and field service for semiconductor manufacturers looking to keep existing inspection systems in operation.
Inspection Applications
KLA Surfscan SP1 and SP2 systems are used to inspect unpatterned wafer surfaces and support semiconductor process monitoring.
Unpatterned Wafer Inspection
Optical surface inspection of bare and unpatterned semiconductor wafers before or between manufacturing processes.
Particle and Defect Detection
Laser-based inspection is used to detect particles and surface defects that may affect downstream semiconductor processing.
Process and Equipment Monitoring
Surface-inspection results can be used to monitor wafer quality and changes associated with semiconductor process equipment.
Support for KLA Surfscan Equipment
Global TechSolutions supports KLA Surfscan SP1/SP2 equipment with refurbishment, installation, preventive maintenance and troubleshooting.
Equipment Refurbishment
Inspection, refurbishment and replacement of parts and assemblies based on equipment condition and the agreed work scope.
Installation and Commissioning
On-site installation, setup and commissioning support for refurbished or relocated equipment.
Preventive Maintenance
Planned inspection and maintenance to support equipment operation and reduce the risk of unplanned downtime.
Troubleshooting and Field Service
On-site technical support for equipment faults, system checks and maintenance requirements.
Component Support
Global TechSolutions supports laser systems used in semiconductor inspection equipment as part of its repair and refurbishment capabilities.
Repair and refurbishment support for laser systems used in semiconductor inspection equipment, including KLA Surfscan platforms.
View Repair ServicesTesting and Qualification
Where applicable, refurbished equipment and repaired assemblies can be tested in our cleanroom before delivery or installation.
Our facility allows equipment functions and performance to be checked under controlled conditions designed to mimic fab operating requirements. Final verification is based on the agreed refurbishment scope and acceptance criteria.
Verification Before Release
Testing is carried out according to the equipment condition, completed work and agreed requirements.
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