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KLA SP1/2 300mm

KLA SP1/2 300mm

We offer refurbishment and support for the KLA SP1/SP2 300mm systems, industry-standard tools for optical surface inspection in semiconductor manufacturing. These systems provide high-sensitivity particle and defect detection across 300mm wafers, using advanced darkfield and brightfield imaging techniques. Ideal for front-end process monitoring, the SP1/SP2 helps identify yield-limiting defects early in the production flow. Our refurbishment services restore full system functionality, enabling precise, high-throughput inspection to support consistent wafer quality and process stability.

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