We provide refurbishment and servicing for the Hitachi CG4000 / 9380, a high-precision Critical Dimension Scanning Electron Microscope (CD-SEM) used in advanced semiconductor manufacturing.

Designed for inline metrology, this system delivers nanometer-level accuracy in measuring feature dimensions across 300mm wafers. 

Ideal for process control during lithography and etch steps, the CG series supports high-resolution imaging, automated pattern recognition, and critical dimension monitoring, ensuring tight process control and high-yield production