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Hitachi CG 4000 / 9380 300mm

Hitachi CG 4000 / 9380 300mm

We provide refurbishment and servicing for the Hitachi CG4000 / 9380 300mm, a high-precision Critical Dimension Scanning Electron Microscope (CD-SEM) used in advanced semiconductor manufacturing. Designed for inline metrology, this system delivers nanometer-level accuracy in measuring feature dimensions across 300mm wafers. Ideal for process control during lithography and etch steps, the CG series supports high-resolution imaging, automated pattern recognition, and critical dimension monitoring—ensuring tight process control and high-yield production

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