Hitachi CG 4000 / 9380 CD-SEM
Hitachi CG4000 / S-9380 CD-SEM
The Hitachi CG4000 and S-9380 are critical dimension scanning electron microscope systems used for semiconductor metrology and process control. Global TechSolutions supports these CD-SEM platforms through refurbishment, installation, preventive maintenance, troubleshooting and electronic-component repair support.
Hitachi CG4000 / S-9380 Overview
The Hitachi CG4000 and S-9380 are CD-SEM systems used to measure critical dimensions on semiconductor wafers. CD-SEM measurements help manufacturers monitor whether patterned features are being produced within the required dimensions during wafer fabrication.
The S-9380 supports wafers up to 300mm, while the CG4000 was developed as a later-generation CD-SEM platform for high-accuracy semiconductor process measurement.
Global TechSolutions supports Hitachi CG4000 and S-9380 equipment with refurbishment and field service for semiconductor manufacturers looking to keep existing metrology systems in operation.
Measurement Applications
Hitachi CG4000 and S-9380 CD-SEM systems are used for semiconductor critical-dimension measurement and process monitoring.
Critical Dimension Measurement
Measurement of patterned semiconductor features to monitor critical dimensions during wafer manufacturing.
Lithography Process Monitoring
CD-SEM measurements can be used to monitor patterned dimensions after lithography steps.
Etch Process Monitoring
Dimensional measurements can also support process control after semiconductor etch steps.
Support for Hitachi CD-SEM Equipment
Global TechSolutions supports Hitachi CG4000 and S-9380 equipment with refurbishment, installation, preventive maintenance, troubleshooting and electronic-component repair.
Equipment Refurbishment
Inspection, refurbishment and replacement of parts and assemblies based on equipment condition and the agreed work scope.
Installation and Commissioning
On-site installation, setup and commissioning support for refurbished or relocated equipment.
Preventive Maintenance
Planned inspection and maintenance to support equipment operation and reduce the risk of unplanned downtime.
Troubleshooting and Field Service
On-site technical support for equipment faults, system checks and maintenance requirements.
Parts and Component Support
Global TechSolutions provides repair support for electronic components used across semiconductor equipment and metrology systems.
Diagnosis, repair and testing support for semiconductor equipment printed circuit boards.
View PCB RepairDiagnostics, servicing and validation support for server systems used with semiconductor equipment.
View Server SupportMaintenance, servicing and technical evaluation for semiconductor equipment controllers.
View ControllersTesting and Qualification
Where applicable, refurbished equipment and repaired assemblies can be tested in our cleanroom before delivery or installation.
Our facility allows equipment functions and performance to be checked under controlled conditions designed to mimic fab operating requirements. Final verification is based on the agreed refurbishment scope and acceptance criteria.
Verification Before Release
Testing is carried out according to the equipment condition, completed work and agreed requirements.
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