About Dry Electrostatic Chucks

Dry electrostatic chucks (ESCs) are critical components used in semiconductor front end equipment to hold wafers securely during processes such as etching, deposition, and lithography. They provide uniform clamping without contamination, ensuring wafer stability and precise alignment throughout high-temperature or plasma-based processes.

Designed for thermal stability and reliability, dry ESCs support consistent wafer processing and high-yield semiconductor fabrication in cleanroom environments