TELINDY Plus 300mm Batch Furnace
TELINDY Plus 300mm Batch Furnace
A 300mm batch thermal processing system used for semiconductor oxidation, annealing, CVD and ALD processes. Global TechSolutions supports TELINDY Plus equipment through refurbishment, parts, installation and ongoing field service.
TELINDY Plus Platform Overview
TELINDY Plus is a Tokyo Electron 300mm batch thermal processing platform developed for front-end semiconductor manufacturing. The system supports thermal processing and thin-film formation applications where controlled batch processing is required.
The platform is associated with oxidation, annealing, chemical vapour deposition and atomic layer deposition processes. Process capability depends on the installed system and process modules.
Global TechSolutions supports TELINDY Plus equipment as part of our semiconductor equipment portfolio, with services covering equipment refurbishment, installation, troubleshooting, preventive maintenance and replacement component support.
Process Applications
TELINDY Plus is used across thermal processing and deposition steps in semiconductor wafer fabrication. Process availability depends on the individual system.
Oxidation
Thermal oxidation processes used to form controlled oxide layers on semiconductor wafers.
Annealing
Controlled thermal treatment for material activation, stabilisation and other wafer process requirements.
CVD
Batch chemical vapour deposition processes for controlled thin-film formation.
ALD
Atomic layer deposition processes requiring controlled and repeatable thin-film growth.
Support for TELINDY Plus Equipment
Our team supports TELINDY Plus systems throughout the equipment lifecycle, from refurbishment and installation to troubleshooting, maintenance and replacement component support.
Equipment Refurbishment
Inspection, restoration, component replacement and system-level work to return equipment to an operational condition suitable for qualification.
Installation and Commissioning
On-site equipment installation, setup and commissioning support for TELINDY Plus platforms.
Preventive Maintenance
Planned maintenance support covering inspections, replacement of service items and checks intended to reduce unplanned downtime.
Troubleshooting and Field Service
Technical support for equipment faults, performance issues and on-site service requirements.
Parts and Component Support
Global TechSolutions supports TELINDY Plus equipment with semiconductor furnace components and supporting parts used across thermal processing systems.
High-purity process tubes, boats, pedestals and other fabricated quartz components for diffusion and thermal processing applications.
View QuartzHeater solutions and refurbishment support for thermal processing equipment where temperature control and heat distribution are critical.
View HeatersTemperature sensing components used to support stable and accurate thermal process control.
View ThermocouplesRefurbishment, overhaul, installation and support for TEL wafer and boat handling robotics.
View RoboticsTesting and Qualification
Equipment and repaired assemblies can be inspected and tested before delivery or installation. Where applicable, testing is carried out in our cleanroom environment to verify equipment performance under controlled conditions that mimic fab operating requirements.
Final verification is matched to the scope of work and the condition of the individual system.
Controlled Verification Before Release
Testing is structured around equipment condition, completed repair work and the required acceptance criteria.
Interested to find out more?
Contact us today for expert guidance