Designed for critical thermal processing steps in modern semiconductor fabrication, the TELINDY Plus™ 300mm system remains a cornerstone for stable, large-batch manufacturing. We provide comprehensive, engineering-led tool refurbishment and high-purity consumable support, offering a highly mature and dependable alternative to purchasing brand-new OEM hardware lines.

By extending the operational lifecycle of your existing 300mm front-end platforms, your fab can optimise capital expenditure while maintaining strict yield stability. Our technical services ensure your thermal workflows meet exact process requirements without the astronomical lead times or premium costs of direct-from-OEM replacements.

• Supported Applications: Optimised for high-uniformity Oxidation, Annealing, and LPCVD processes (including Poly-Si, SiO₂, and Si₃N₄).

• Operational Reliability: Engineered to maximise Mean Time Between Failures (MTBF) and deliver consistent film uniformity across production runs.

• Consumables & Parts Ecosystem: Direct access to precision-matched replacement consumables, including high-purity quartzware and robust vertical heater elements to minimise subfab downtime.