The AMAT VANTAGE RTP 300MM provides industry-leading, high-productivity solutions for volume, atmospheric RTP applications. By using the Applied Vantage RadiancePlus RTP system, this machinery combines a production-proven low CoO platform with RTP chamber technology.

By optimising the hardware and temperature control, the AMAT VANTAGE RTP 300MM is capable of delivering unprecedented spike anneal uniformity for implant and other anneal