LAM 2300 Exelan Flex 45 300mm
LAM 2300 Exelan Flex 45 300mm
We provide refurbishment and technical support for the LAM 2300 Exelan Flex 45 300mm, a high-performance plasma etch system designed for advanced dielectric etch applications. Part of the LAM 2300 series, the Exelan Flex 45 features high-density plasma technology, enabling precise, anisotropic etching with excellent selectivity and profile control. Optimized for low-k dielectrics and high-aspect-ratio features, this system supports 300mm wafer processing in high-volume fabs. Our refurbishment services ensure full tool restoration, maintaining performance, reliability, and yield consistency for demanding semiconductor manufacturing applications.
Interested to find out more?
Contact us today for expert guidance