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AMAT Centura™ ACP 300mm

Etch Refurbishment & Support

Reliable, Process-Proven Support for Mature Dielectric & Conductor Etch Lines

We offer professional refurbishment services for the AMAT Centura ACP, a trusted tool in advanced wafer cleaning and surface preparation. Our team restores these systems to optimal performance, ensuring precise and consistent results in critical FEOL processes such as pre-deposition and pre-implant cleaning.

With expertise in ACP technology and 300mm platform integration, we help extend equipment lifespan, reduce downtime, and support high-yield manufacturing.

  • Supported Applications: Tailored for critical chamber profile control across dielectric and advanced etch applications on the stable Centura platform.

  • Operational Reliability: Focused on strict chamber-to-chamber matching, optimizing RF path integrity to ensure consistent yield stability.

  • Consumables & Parts Ecosystem: Direct supply of erosion-resistant chamber consumables, focus rings, and high-purity gas delivery components.

Interested to find out more?

Contact us today for expert guidance