Semiconductor Vertical Furnace Heaters
Global TechSolutions provides refurbishment support for TEL and Kokusai vertical furnace heater models used in semiconductor thermal processing equipment.
Coverage includes TEL 300M heater configurations and Kokusai Zestone and Quixace heater models. Exact support should be confirmed against the heater model, configuration and available part information.
TEL 300M Heater Coverage
01
MICA Heater
02
BOH Heater
03
TEL Formula Heater
04
TEL Alpha-303i Heater
05
TEL High Temp Heater
VMU-54-001
06
TEL Mid Temp Heater
VMM-56-002
07
TEL FTPS
VOS-56-002 / VOS-56-003
08
Torch Heater
1187-149792-12 / 1187-149702-13, 14 / 1187-146257-15, 16
Kokusai Heater Coverage
01
Zestone
Z3B / Z3C / Z5B
02
Quixace
QHT / QLN / QLV / QMN / Q2LN / Q2LV
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