CVD heaters are critical components in front end semiconductor equipment, providing precise temperature control for thermal processing steps such as film deposition.
We design, refurbish, customise, install, test and commission low pressure CVD heaters used in semiconductor manufacturing. Our design improvements focus on optimising the placement of heating elements to achieve uniform heat distribution across the substrate. This minimises hotspots and temperature gradients, resulting in better process control, improved film quality and higher yield.
About CVD / PVD Heaters
CVD and PVD heaters are used in semiconductor front end manufacturing to provide controlled heating for chemical vapor deposition (CVD) and physical vapor deposition (PVD) processes. They ensure uniform wafer temperature, supporting consistent thin film deposition and process reliability.
These heaters are designed for thermal stability and durability, maintaining precise heat distribution in high-temperature, cleanroom environments.
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