NOVA Scan 300mm
NovaScan 300mm Integrated Metrology
NovaScan systems from Nova Measuring Instruments are optical metrology platforms used for semiconductor thin-film measurement and process control. Global TechSolutions supports 300mm NovaScan equipment through refurbishment, installation, preventive maintenance, troubleshooting and in-line metrology component repair.
NovaScan 300mm Overview
NovaScan systems are semiconductor optical metrology tools designed to measure wafer structures without contacting the wafer surface. The 300mm NovaScan family includes systems developed for thin-film thickness measurement, CMP process control and optical critical-dimension metrology.
NovaScan 3060 systems were developed for 300mm CMP metrology, while later NovaScan 3090 platforms expanded the family into broader thin-film and optical CD measurement applications.
Global TechSolutions provides repair and refurbishment support for Nova in-line metrology equipment, including NovaScan 3060, NovaScan 3090 and NovaScan 3090 Next systems.
Measurement Applications
Across the 300mm NovaScan family, applications include thin-film thickness measurement, CMP process metrology and optical critical-dimension measurement.
Thin-Film Thickness Measurement
Optical measurement of semiconductor thin films and layer stacks for process monitoring and wafer-level measurement.
CMP Process Metrology
Thickness measurement and wafer mapping used to monitor material removal before and after chemical mechanical planarisation.
Optical CD and Profile Measurement
Later NovaScan 3090 systems support optical critical-dimension measurement and profiling of semiconductor structures.
Support for NovaScan Equipment
Global TechSolutions supports NovaScan in-line metrology equipment with repair, refurbishment, installation, preventive maintenance and troubleshooting.
Equipment Refurbishment
Inspection, refurbishment and replacement of parts and assemblies based on equipment condition and the agreed work scope.
Installation and Commissioning
On-site installation, setup and commissioning support for refurbished or relocated equipment.
Preventive Maintenance
Planned inspection and maintenance to support equipment operation and reduce the risk of unplanned downtime.
Troubleshooting and Field Service
On-site technical support for equipment faults, system checks and maintenance requirements.
In-line Metrology Component Support
Global TechSolutions provides component-level repair support for Nova in-line metrology equipment, including the following system assemblies.
Repair and refurbishment support for Nova metrology measurement units used for optical wafer measurement.
View Nova SupportRepair support for light-source assemblies used within Nova in-line metrology systems.
View Nova SupportRepair support covering the handler, handler controller and elevator controller used within supported Nova systems.
View Nova SupportComponent-level repair support for Nova control units and power-supply modules.
View Nova SupportTesting and Qualification
Where applicable, refurbished equipment and repaired assemblies can be tested in our cleanroom before delivery or installation.
Our facility allows equipment functions and performance to be checked under controlled conditions designed to mimic fab operating requirements. Final verification is based on the agreed refurbishment scope and acceptance criteria.
Verification Before Release
Testing is carried out according to the equipment condition, completed work and agreed requirements.
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