AMAT Reflexion™ CMP 300mm
AMAT Reflexion CMP 300mm
The AMAT Reflexion is a 300mm chemical mechanical planarisation platform from Applied Materials used in semiconductor manufacturing. Global TechSolutions supports Reflexion CMP equipment through refurbishment, installation, preventive maintenance, troubleshooting and related parts and component support.
AMAT Reflexion CMP Overview
The Applied Materials Reflexion is a semiconductor equipment platform used for chemical mechanical planarisation, commonly shortened to CMP. CMP combines polishing and chemical action to create a flatter wafer surface during semiconductor manufacturing.
Reflexion is a 300mm CMP platform used across a range of planarisation processes. The exact process capability of an individual system depends on its installed configuration and process setup.
Global TechSolutions supports AMAT Reflexion CMP 300mm equipment with refurbishment and field service for customers looking to keep existing equipment in operation.
Process Applications
AMAT Reflexion systems are used for chemical mechanical planarisation in semiconductor manufacturing. The processes available on a specific system depend on its installed configuration and process setup.
Chemical Mechanical Planarization
CMP is used to polish and flatten wafer surfaces during semiconductor manufacturing.
Metal CMP
Reflexion systems can be used for CMP processes involving metal layers in semiconductor device manufacturing.
Dielectric CMP
Reflexion systems can also support planarisation processes involving dielectric materials.
Support for AMAT Reflexion CMP Equipment
Global TechSolutions supports AMAT Reflexion CMP equipment with refurbishment, installation, preventive maintenance, troubleshooting and parts and component support.
Equipment Refurbishment
Inspection, refurbishment and replacement of parts and assemblies based on equipment condition and the agreed work scope.
Installation and Commissioning
On-site installation, setup and commissioning support for refurbished or relocated equipment.
Preventive Maintenance
Planned inspection and maintenance to support equipment operation and reduce the risk of unplanned downtime.
Troubleshooting and Field Service
On-site technical support for equipment faults, system checks and maintenance requirements.
Parts and Component Support
Global TechSolutions supplies and supports CMP consumables and wafer-handling robotics used with AMAT Reflexion equipment.
Overhaul and repair support for Kawasaki 3NS411B and 3NS511C wafer-handling robots used on AMAT Reflexion equipment.
View Kawasaki RoboticsTesting and Qualification
Where applicable, refurbished equipment and repaired assemblies can be tested in our cleanroom before delivery or installation.
Our facility allows equipment functions and performance to be checked under controlled conditions designed to mimic fab operating requirements. Final verification is based on the agreed refurbishment scope and acceptance criteria.
Verification Before Release
Testing is carried out according to the equipment condition, completed work and agreed requirements.
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