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AMAT Centura (Enabler E2, E5)
AMAT Producer (STD, Georgia, Georgia CIP)
AMAT Centura / Sym3
LAM Exelan (Flex 45, DX)
LAM Versys Kiyo 45, CX, EX
LAM Exelan Flex CX
LAM DFM 9400
Novellus Speed ESC
We provide refurbishment and repair services for Dry Electrostatic Chucks, including thorough inspection, cleaning, and part replacement to restore performance and extend lifespan.
Contact us today for expert guidance
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