We supply CMP consumable parts to ensure consistent performance and high yield in wafer planarization
Model: AMAT Reflexion / LK, Ebara 300S/300S2, Ebara 300X
Model: AMAT Reflexion / Reflexion LK, Ebara FREX300s, Ebara FREX300s2.
Model: Ebara 300S2
Model: LAM, Ebara & TEL
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CMP Consumable Parts
Description
We supply CMP consumable parts to ensure consistent performance and high yield in wafer planarization
Membrane
Model: AMAT Reflexion / LK, Ebara 300S/300S2, Ebara 300X
Membrane
Model: AMAT Reflexion / Reflexion LK, Ebara FREX300s, Ebara FREX300s2.
Chuck Roller
Model: Ebara 300S2
CMP Pad
Model: AMAT Reflexion / Reflexion LK, Ebara FREX300s, Ebara FREX300s2.
CMP Pad
Model: AMAT Reflexion / Reflexion LK, Ebara FREX300s, Ebara FREX300s2.
Idler Roller
Model: AMAT Reflexion / Reflexion LK, Ebara FREX300s, Ebara FREX300s2.
Gasket
Model: LAM, Ebara & TEL
Gasket
Model: LAM, Ebara & TEL
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