Using a proprietary optical system, the NOVA Scan provides precise thickness measurement without contacting the wafer. Its design significantly reduces manual handling and removes the requirement for additional checks after the wafer has been cleaned and dried.

The system delivers high-resolution measurement and mapping for advanced semiconductor processes down to the 0.09 micrometer node. It supports fabs in expanding production from 200 millimeter to 300 millimeter wafers while maintaining consistent accuracy and process stability.

Equipped with updated software, the NOVA Scan offers enhanced functionality and faster measurement performance while remaining intuitive and easy to operate.

At GTS, we provide expert refurbishment, repair, and maintenance services for advanced metrology systems used in semiconductor process control, including deposition, etch, CMP, and thin-film measurement applications. Our in-house capabilities enable system repairs, parts replacement, and comprehensive quality verification, ensuring your equipment operates at peak performance and reliability. Every service is accompanied by a detailed repair report, and we strongly recommend using a customer-qualified wafer for post-acceptance verification. By maintaining your metrology tools in optimal condition, we help semiconductor manufacturers achieve consistent and accurate measurements across 200mm and 300mm production lines.