We offer refurbishment and support for the Kokusai Quixace 2, a high-efficiency vertical thermal processing system designed for advanced CVD and diffusion applications.

Commonly used for processes such as LPCVD, oxidation, and annealing, it delivers excellent film uniformity, process repeatability, and reduced particle contamination. 

Its compact, high-throughput design supports 300mm wafer production with precision temperature control, making it a reliable choice for both FEOL and BEOL thermal steps.