AMAT SEMVision G3/4 300mm
AMAT SEMVision G3/4 300mm
We provide expert refurbishment services for the AMAT SEMVision G3/G4, a high-resolution e-beam defect review system used in advanced process control.
Designed for 300mm wafer manufacturing, the SEMVision provides high‑resolution imaging for complex wafer structures, including 3D devices and high‑aspect‑ratio features. The system combines automated defect review with intelligent defect classification, enabling faster root-cause analysis, improved process monitoring, and higher production yield.
Ideal for both FEOL and BEOL process monitoring, it enables root-cause analysis and yield improvement by bridging optical inspection with electron-beam level detail.
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