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Kokusai Quixace 2 300mm

We offer refurbishment and support for the Kokusai Quixace II 300mm, a high-efficiency vertical thermal processing system designed for advanced CVD and diffusion applications. Commonly used for processes such as LPCVD, oxidation, and annealing, the Quixace II delivers excellent film uniformity, process repeatability, and reduced particle contamination. Its compact, high-throughput design supports 300mm wafer production with precision temperature control, making it a reliable choice for both FEOL and BEOL thermal steps. Our refurbishment services restore full tool functionality for stable and consistent performance.

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